Water Vapor Desorption Products

UVC-based and IR-based water vapor desorption / oxidative hydrocarbon removal systems for vacuum chambers.

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RBD's desorption of water vapor products include high power high temp IR radiant bakeout emitters and low power low temperature UVC emitters to facilitate the desorption of water vapor in vacuum chambers. Using UVC to desorb water vapor is ideal for chambers that have Viton O-ring seals, which pump down in the range of the low 10-6 to low 10-7 Torr. Benefits include faster pump down times and a lower ultimate vacuum. UVC is also used to break down hydrocarbons.

For more information on water vapor and it's effects on vacuum chambers, please see this collection of articles (compiled by Normandale Community College) by the late Phil Danielson (formally of The Vacuum Lab).

 

VB Series

VB Series

The VB Series of vacuum bakeout packages are designed for systems that can take the high heat of shortwave IR. High-power infrared radiation heats the vacuum chamber from the inside out to effectively desorb water vapor from vacuum chambers.

The VB-1 operates on 120 VAC, and the VB-2 is available for 230 VAC.

The IRB-600 IR Emitter and BC-3 Bakeout Controller can be purchased separately.


BC-3

The BC-3 Bakeout Controller provides total control of your desorption of water vacuum chamber bakeout process. The power to the heat source is variable and thermocouple feedback is used to regulate the temperature of the vacuum chamber.

IRB-600

The IRB-600 Infrared Emitter Assembly provides 600 watts of shortwave infrared heating to the inside of vacuum chambers to effectively remove water vapor from the chamber walls.

 

 

 

UVB-100 Chamber

UVB-100

The UVB-100 uses UVC radiation for the desorption of water vapor without heat.

Flange Mounting Options
The UVB-100 comes standard with 2.75 CF or NW40 (K150) KF mount.
Other flange mounts are available on request.

 

 

miniZ

miniZ

The miniZ is ideal for solving water vapor problems in compact vacuum chambers such as the Kimball Physics Multi-CF line of spherical chambers, mini ALD chambers, pressure cells and load locks.

Remote Control Options

The miniZ power supply is simple to use – just turn it on! A remote ON/OFF option is available if you want to operate the miniZ by a process controller or set point.

 

Demo Units Available

Demo units are available for some of our water vapor desorption products Please read this FAQ for additional information.