miniZ Water Vapor Desorption System

Water vapor desorption and oxidative hydrocarbon removal system for compact vacuum chambers.

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The miniZ is the latest addition to the RBD Instruments line of water vapor desorption / oxidative hydrocarbon removal systems. This water vapor desorption system comprises a high power UVC emitter that fits inside a standard 1.5" I.D. vacuum chamber tube and a compact power supply which mounts directly to the 2.75" CF flange.

The miniZ is ideal for solving water vapor problems in compact vacuum chambers such as the Kimball Physics Multi-CF line of spherical chambers, mini ALD chambers, pressure cells and load locks.

The miniZ power supply is simple to use – just turn it on when you start pumping! A remote ON/OFF option is available if you want to operate the miniZ by a process controller or set point.

Available in 2.75"and 4.5" CF flange sizes.



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Technical Information

185nm UVC radiation provides the correct wavelength of energy to desorb water vapor molecules from the chamber walls and results in faster chamber pump down times and lower ultimate vacuum.

Produces 350 uW/cm2 @ 6cm from end of emitter (2.75" flange)

For more information on water vapor and it's effects on vacuum chambers, please see this collection of articles (compiled by Normandale Community College) by the late Phil Danielson (formally of The Vacuum Lab).

miniZ datasheet
miniZ CAD File
miniZ Dimensions

Application Notes and Whitepapers


Demo Video