microCMA Compact Auger Analyzer

Add a Complete Auger System to Your Vacuum Chamber

 

Simple to operate and easy to maintain, the microCMA provides a complete quantitative surface sensitive elemental Auger Electron (AES) analyzer package that mounts on a 2.75”/ 70 mm CF flange.

For elemental analysis, the microCMA is much more affordable than a standalone XPS system.

The complete AES system includes the cylindrical mirror analyzer (with integrated coaxial electron gun), a USB interface controller, and Windows acquisition and data-massage software. It's Auger analysis made easy!

Learn more about Auger Spectroscopy...

Frequently Asked Questions

Datasheet

 

Applications

The microCMA is an Auger Spectroscopy cylindrical mirror analyzer designed for the many applications for Auger analysis that do not require AES mapping capability
Those applications include analysis of:

• Thin film elemental composition
• Sample cleanliness
• Metal component thermal oxides
• Quantization of light element surface films

Overview Video

Features

• Compact: Fits on a 2.75" / 70 mm CF flange (min. 1.52" / 38.6 mm I.D. tube). It is now possible to build an Auger Spectroscopy system with just a T and a small ion pump!
• Proven Design: The second order focusing of the Cylindrical Mirror Analyzer provides both good transmission and resolution.
• Easy to Use:The USB control and data-massage Auger software interface is simple to use and makes Auger analysis easy.
• Powerful: Auger Spectroscopy (AES) is a powerful surface sensitive technique that provides you with quantitative information on the first few monolayers of your sample.

 

Kimball Physics Chamber with microCMA, miniZ, and IG2

 

Benefits

• The small diameter of the microCMA allows it to fit on existing deposition or analytical chambers.
• Because the microCMA is based on the classic cylindrical mirror analyzer design, it has a similar signal-to-noise when compared with larger CMAs. Basically, the microCMA collects the same electrons as larger CMAs do; it just collects the electrons closer to the sample.
• Integrated 3 kV electron gun simplifies the CMA-to-sample alignment.
• Electron gun has automated features such as warm up and conditioning.
• The microCMA is perfect for elemental surface analysis of thin films and for checking the cleanliness of samples
• The CMapp Auger software provides total control of acquisition parameters and then quantifies the data post-acquisition.

 

Application Notes and Whitepapers

• Electron Enhanced Growth of Crystalline Gallium Nitride Thin Films at Room Temperature and 100 °C Using Sequential Surface Reactions - Sprenger, Sun, Cavanagh, Roshko, Blanchard, George, Chemistry of Materials, U. Colorado - 2016
• Design and Simulation of a Miniature Cylindrical Mirror Auger Electron Energy Analyzer with Secondary Electron Noise Suppression - Jay A. Bieber, University of South Florida - 2017
• Electron-Enhanced Atomic Layer Deposition of Boron Nitride Thin Films at Room Temperature and 100° C - Sprenger, Sun, Cavanagh, Roshko, Blanchard, George - J Phys Chem C Nanomater Interfaces. U. Colorado - 2018
• Correlation of Auger electron spectroscopy and microsynchrotron radiation x-ray photoelectron spectroscopy investigations of Ba-Sc-O desorption on W(100) _$ -Caixia Meng, Yifan Li, Hao Wu, Wei Wei, Yanxiao Ning, Yi Cui, Qiang Fu, Xinhe Baos - Physical Chemistry Chemical Physics - 2018
• Development and testing of an in situ method of ion beam analysis for measuring high-Z erosion inside a tokamak using an AIMS diagnostic_pdf - Leigh A. Kesler, Massachusetts Institute of Technology - 2019
• Structural transformation of h-BN overlayers on Pt(111) in oxidative atmospheres) _$ - Mroz, Kordesch, Sadowski, Tenney, Eads - Journal of Vacuum Science & Technology, B.Brookhaven National Laboratory - 2020
• Adsorption and reaction kinetics of SO₂ on graphene: An ultrahigh vacuum surface science study _$ - Stach, Johnson, Stevens, Burghaus - Journal of Vacuum Science & Technology, North Dakota State - 2021
• Hollow cathode plasma electron source for low temperature deposition of cobalt films by electron-enhanced atomic layer deposition - Sobell1, Cavanagh1, Boris, Walton, George - Journal of Vacuum Science & Technology, U. Colorado, Naval Research Laboratories - 2021

 

Mechanical Specifications and Customizations

Customs lengths are available. Contact us for more information.
microCMA Dimensions Form
microCMA Dimensions Form (print version)

microCMA SOLIDWORKS^®

Considerations

• The end-of-optics to sample distance is 4 mm.
• Since the microCMA is so small, the co-axial built-in electron gun is limited to 3 kV.

 

Downloads

Download Windows drivers and the CMapp application for the microCMA below.

microCMA Drivers
Unplug the microCMA USB interface before downloading, then plug back in for updates to take effect.

microCMA CMapp Application.
Uninstall any previous versions of CMapp before installing the latest version.

 

Sample Data

microCMA Sample Survey Data

 

Installation and Operation Manual

microCMA Manual