Auger Electron Spectroscopy is an analytical technique that uses a primary electron beam to probe the surface of a solid sample. Secondary electrons are emitted as a result of the Auger effect and the kinetic energy of those electrons is element specific. By differentiating the peak energy from the background energy, quantitative analysis is possible. AES is a surface sensitive technique due to the short mean free path of the electrons, just a few nanometers. All light elements except H and He are detected.
The cylindrical mirror analyzer is a variation of the parallel-plate analyzer design and is today the most popular type for AES due to the design's high sensitivity and throughput.
Mechanical Specifications and Customizations
Customs lengths are available. Contact us for more information.
microCMA Dimensions Form
microCMA Dimensions Form (print version)
Download Windows drivers and the CMapp application for the microCMA below.
Unplug the microCMA USB interface before downloading, then plug back in for updates to take effect.
microCMA CMapp Application.
Uninstall any previous versions of CMapp before installing the latest version.
microCMA Sample Survey Data
Installation and Operation Manual