Includes cylindrical mirror analyzer, USB controller and Windows acquisition and data massage software.
Simple to operate and easy to maintain, the microCMA provides a quantitative surface-sensitive AES Auger Electron Spectroscopy analyzer package that mounts on a 2.75”/ 70 mm CF flange.
For elemental analysis, the microCMA is much more affordable than a standalone XPS system.
The complete AES system includes the cylindrical mirror analyzer (with integrated coaxial electron source), a USB interface controller, and Windows acquisition and data-massage software. It's Auger analysis made easy!
Base package: microCMA analyzer, USB interface controller, preamp with 15 ft (4.6m) cable, data acquisition and massage software, and manual.
Optional accessories: XYZ translator, 9103 USB picoammeter, custom lengths for CMA and preamp cable.
Complete configuration and ordering information...
Powered by BiozWhat's Special About the microCMA?
We at RBD Instruments think that the microCMA is the best little AES cylindrical mirror analyzer on the planet.
By utilizing the cylindrical mirror design, the microCMA has the same sensitivity and energy resolution as much larger and more expensive Auger Electron spectrometers.
A CMA accepts electrons at a 42.3° angle (which is the angle where second-order focusing is possible). The CMA Entrance Angle drawing shows that both the 2.75" flange microCMA and the 10.0" 25-120A CMA (used on the PHI 660 system) accept electrons at the 42.3° angle. Since the microCMA has a smaller diameter than the 25-120A, the end of optics-to-sample distance is shorter. But the same electrons are collected whether using the microCMA or the 25-120A.
CMA Entrance Angle
microCMA Data Compared to Full-Size CMA Data
As shown in the two surveys below, the Auger data taken by the microCMA and 25-120A full-size analyzer are comparable. The surveys are copper samples which were both acquired with 3kV electron beam energy and 300nA of target current.
microCMA Compact Auger Analyzer
25-120A Full-size Auger Analyzer (PHI 660 System)
Theory and Applications
The microCMA is an Auger Spectroscopy cylindrical mirror analyzer designed for the many applications for Auger analysis that do not require AES mapping capability
Those applications include analysis of:
- Thin film elemental composition
- Sample cleanliness
- Metal component thermal oxides
- Quantization of light element surface films
- Surface contamination analysis
Learn more about Auger Spectroscopy
Learn about using Auger for Molecular Beam Epitaxy (MBE)
Overview Video
Features and Benefits
- Compact: Fits on a 2.75" / 70 mm CF flange yet has a similar signal-to-noise when compared with larger CMAs. The small diameter of the microCMA allows it to fit on existing deposition or analytical chambers.
- Proven Design: The second order focusing of the classical design Cylindrical Mirror Analyzer provides both excellent signal transmission and energy resolution.
- High Surface Sensitivity: Analyzes the top atomic monolayers of your sample, providing detailed elemental information about surface composition. AES is perfect for elemental surface analysis of thin films and for checking the cleanliness of samples.
- Wide Elemental Range: Detects elements from lithium (Li) and heavier, including light elements which can be difficult to analyze with other techniques.
- East to Use: The integrated 3 kV electron gun, USB control and software interface simplify Auger analysis. The CMapp Auger software provides total control of acquisition parameters and then quantifies the data post-acquisition.
Send RBD Your Sample for Analysis
Not sure if the microCMA can meet your needs? Send us a sample for analysis.
Contact us for more information.
Demo Video
Application Notes and Whitepapers
Sample Data
microCMA Sample Survey Data (pdf)
microCMA Sample Data files (CMapp native and ASCII txt)
To view CMapp files, download and install the CMapp application.
ASCII text samples files can be viewed / graphed from any application that can import columnar text, such as Excel.
Mechanical Specifications and Customizations
Customs lengths are available. Contact us for more information.
microCMA Dimensions Form
microCMA Dimensions Form (print version)
Considerations
- The end-of-optics to sample distance is 4 mm.
- Since the microCMA is so small, the co-axial built-in electron source is limited to 3 kV.
Ordering Information
Request Quote / Info
Please fill out this microCMA Dimensions Form indicating the flange-to-sample distance so that we can quote the correct length CMA and Z translator combination.
Customs lengths are available.
| Part Number | Description |
|---|---|
| MCMAPR | microCMA package: Controller, Analyzer & System Cable. Includes Compact 2.75" / 70 mm CF flange mounted Auger CMA with USB control, software and cables. Z-translator and 9103 picoammeter are not included in price. Z-translator is required. 9103 is recommended. |
| EQA-BLT27S-02 | Z axis translator, 2" (50mm) stroke, Compressed Height 2.6" (66mm) |
| EQA-BLT27S-03 | Z axis translator, 3" (75mm) stroke, Compressed Height 2.75" (70mm) |
| EQA-BLT27S-04 | Z axis translator, 4" (100mm) stroke, Compressed Height 2.9" (74mm) |
| EQA-BLT27S-06 | Z axis translator, 6" (150mm) stroke, Compressed Height 3.2" (81mm) |
| MCMACTLRPR | microCMA Controller Only |
| MCMAOPPR | microCMA Analyzer Only |
| MCMA-5901-EDR | Channeltron CEM 5901 Multiplier for mCMA, EDR |
| MCMA-CA17-A | microCMA System Main Cable - 15-foot (4.6-meter) length |
| MCMA-CA17-B | microCMA System Main Cable - 10-meter (32.8-foot) length |
| MCMA-CA17-U | microCMA System Main Cable upgrade to 10-meter (32.8-foot) length when purchased with MCMA Package. Incurs additional charge. |
Downloads
microCMA Drivers
Unplug the microCMA USB interface before downloading, then plug back in for updates to take effect.
CMapp for the microCMA - Version 1.3
Installation and Operation Manual
microCMA Operation and Training Videos (Playlist)
In regions such as China without access to YouTube, the training videos can also be found here.