The IG2 sputter ion gun package is the perfect solution for low cost ion beam etching and sputter cleaning of specimens for surface analysis, cleaning STM tips, general vacuum science and nano technology applications.
If you just want to clean the surface of your sample or STM tip, why pay more than you need to? This simple to operate and reliable sputter ion gun and control comprise the lowest priced package on the market today! The IG2 can also operate with inert gases such as Argon as well as Oxygen.
All packages include a 1 Year Warranty
Base package: Model 04-165 2 kV Backfill Ion Gun (7” standard, 9” optional), model 32-165 Ion Source Control (90 to 264 VAC input voltage), 15 ft. (4.6m) cable, and manual.
Optional accessories: XY alignment bellows (9” 04-162 required), custom length cable.
Complete configuration and ordering information...
Datasheet
Technical Information
PHI Compatibility
The RBD 04-165 Ion Gun is interchangeable with the PHI 04-161 and 04-162 ion guns.
The RBD 32-165 Ion Source Control is interchangeable with the PHI 20-045 control.
As a result, the RBD 04-165 works with the PHI 20-045, and the PHI 04-161 and 04-162 ion guns work with the RBD 32-165.
IG2 Source Drawing
Theory of Operation
The 04-165 Backfill Ion Source generates an energetic inert gas ion beam for sputter-etching solid surfaces. The source requires a static pressure of 5x10-5 torr with an inert gas such as argon (see datasheet for list of compatible gasses). Ions are generated by electron impact within the ion source’s dual filament ionization chamber and are then focused at the target with energies of up to 2 kV. The impurity content of the ion beam is minimized by using an off-axis filament geometry. A focusing lens permits high ion current density to be obtained for a given operating pressure and source-to-sample distance. A dual tungsten filament assembly permits continued operation when the first filament opens. The expected lifetime of the filament assembly is several years under normal usage at the recommended operating conditions. The filament assembly is easily replaced in the field.
The Model 32-165 2 kV Ion Source Control provides all the necessary voltages and currents required to operate the 04-165 2 kV Backfill Ion Source. The beam voltage may be activated manually, remotely, or with the built-in timer. Additionally, the anode (ion) and filament currents, as well as the beam and focus voltages, may be externally monitored to ensure accurate reproduction of sputtering conditions.
Application Notes and Whitepapers
| Part Number |
Description |
| IG2PKGPR |
Includes 32-165 controller, standard 7" length 04-165 2kV ion source, 15 ft. (4.6 meter) cable, and manual.
Universal Input voltage is 100 to 240VAC. |
| IG2PKGEXTPR |
Includes 32-165 controller, extended 9.25" length 04-165 2kV ion source, 15 ft. (4.6 meter) cable, and manual.
Universal Input voltage is 100 to 240VAC. |
| 32165PR |
32-165 Ion Source Control (for IG2) with DVM |
| 04165PR |
04-165 Ion Source only, 7" length |
| 04165XPR |
04-165 Ion Source only, 9.25" length |
| 04165CPR |
04-165 Ion Source, Custom Length |
| IG2-EAPR |
XY Equipment Aligment bellows for 04-165 Ion Sources |
| SUB-IG2-CA1 |
Control Control Cable from RBD 32-165 to RBD 04-165; 15 feet (4.6 meters) |
| SUB-IG2-CA2 |
Control Cable from RBD 32-165 Ion Gun Control to PHI 04-161/162 Ion Gun; 15 feet (4.6 meters) |
| SUB-IG2-CA3 |
Control Cable from PHI 20-045 Control to RBD 04-165 Ion Gun; 15 feet (4.6 meters) |
| SUB-IG2-CA4 |
Control Cable from RBD 32-165 to RBD 04-165; custom length up to 25 feet (7.6 meters) |
Support
Replacement parts and filaments are available for the IG2:
- Screen, extractor cap / ionizer grid (04-165-MD15)
- Ceramic kit (04165CSPR)
- Ionizer assembly (04165IAPR)
- 04-165 Dual Filament Kit (04165FKPR)
Includes: 1- Filament Assembly (includes 2 filaments); 3- Ceramic washers; 3" Nickel wire; 1- Hex tool
Contact RBD for price and availability
Manual
Quick-start Guide
Filament Change Procedure