PHI Optics Parts

Replacement parts for many older PHI / PerkinElmer Auger, XPS, and SIMS systems.

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When returning an item to RBD that has been installed in a vacuum chamber please fill out this Non-Contamination Form and return it with the item.

Sputter Ion Source Parts

  • Tungsten filaments
  • Dual filament Yttrium coated Iridium
  • Screen, extractor cap / ionizer grid
    (for RBD IG2, and PHI 04-165, 04-161, 04-162, 04-191, and 04-192 ion sources)
  • 04-303 ionizer assembly repair or rebuild (w/exchange)
    (average lifetime 1100 hours)
  • 04-303 grid (self-install) ● Installation Video ● Alignment Video
  • 06-350 ionizer assembly rebuild (w/exchange)

 

Electron Multipliers

  • Electron multipliers for PHI AES and XPS analyzers
  • Channeltron for SCD, CMA, and SIMS

 

XPS Model 04-500, 04-548 X-ray Source Parts

  • 15kV dual anode recoating service, exchange
    Customer's anode is subject to inspection by RBD Instruments before it can qualify as an exchange.
  • Slotted Silver Specimen XPS Small Spot Alignment Standard
  • 04-500/548 Football ceramic
  • Old style 04-500/548 Filament (no exchange
  • X-Ray Source retainer ring, collimator, and windows
  • Fixed Resistor, 1K ohm, 15kv
  • 5/16 Teflon tubing for x-ray source
  • Notched ceramic
  • High-voltage cables and connectors
  • New style 04-500/548 Filament ● Datasheet ● Installation Video

 

Electron Source Filaments

  • LaB6 filaments for PHI 660 systems
  • C75-010 filaments (for 10-155, 15-255G, 25-267/270, and 04-015 neutralizers) - refurbished, new, and alignments
  • Tungsten filament for 04-090 and 04-085 (rebuild w/exchange)

 

Heat Exchanger Deionizer Parts

  • Deionizer cartridge and particle filters
  • Water pump for 16-020 and 16-050 chiller (Replaces Procon-type pump)
  • 120 VAC Flow Switch (1.5gpm )
  • Voltage Converter Kit for 120VAC Flow Switch to 220VAC
  • Crydom Relay for 16-050 and 16-020

 

Miscellaneous Optics Parts

  • UTI 100C RGA filament set
  • 04-085 Neutralizer Ceramic
  • USB Camera for system microscope (can be used with existing PHI system microscope)
  • System Microscope with lenses and mounting hardware
  • Dynode for 660
  • 600/660 Objective Coil
  • 04-303 HV replacement cable
  • Bristol wrenches and screwdrivers
  • X-Ray Source Tool Kit