The IRB-600 Infrared Emitter Assembly provides 600 watts of shortwave infrared heating to the inside of vacuum chambers to effectively remove water vapor from the chamber walls.
When used with the BC-3 Bakeout Controller, the IRB-600 is temperature-regulated and vacuum-interlocked. If your vacuum chamber uses ion pumps, the pumps can become choked with water vapor. The Vacuum Interlock feature prevents ion pump choking by turning off the heaters when the vacuum set point, typically 2 x 10E-6 Torr, is reached.
We are a thin film synthesis group employing an unconventional growth technique for MBE that involves metal-organic precursors. The configuration of our chamber makes baking after a vent very difficult, so we got the IRB lamp to make it easier to bake the system after vents and to desorb the water and organic material that comes in from the precursors. The IRB has been great for us, accelerating our pumpdown, lowering our base pressure by a factor of 5, and allowing us to clean the chamber walls after we’ve used the precursors.
We use it regularly and would recommend any group doing CVD, ALD, or metal-organic MBE or who has a difficult-to-bake system to get an IRB.