5600 XPS analyzer voltages

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One of the more common questions that we get when a PHI 5500 or 5600 XPS system loses the ability to collect data, is –  “how can we test the analyzer voltages?”   This post will explain the procedure in detail.

First though, the disclaimers –

#1 This procedure involves measuring potentially lethal voltages and is to be performed only by personnel property trained to work safely with high voltage.

#2 It is recommended that these measurements be taken using a Fluke 80K-40 high voltage probe or equivalent.  The impedance of the 80-40K is high enough that it will not load down the 80-365/66 analyzer control voltages which will be measured during this test procedure.

Procedure

  1. Turn off the card rack power
  2. Remove the filter box from the analyzer by loosening the two 9/16″ bolts and then sliding the preamp off the SCA connector.  Do not remove the black high voltage cable that is connected to the filter box.
  3. Remove the 6 screws and take the cover off the filter box.
  4. Position the filter box so that you can get to the connection points shown in the photos below.
  5. Connect a jumper clip from the filter box chassis to the vacuum chamber.  This will ensure that the filter box is grounded.
  6. Connect the ground lead of the high voltage probe to the vacuum chamber, and the input end of the high voltage probe to the E7 IS test point in the filter box.  The test points are hard to get to so you may need to use a small alligator or Pomona clip for the connection point inside the filter box and then connect the other end of the clip to the high voltage probe input.
  7. Refer to the table below.
  8. Turn on the card rack power and set up an alignment with a upper limit and lower limit of 1000eV.  For any given pass energy voltages are shown for the inner cylinder ((IS), the mid-ring (MR), the outer cylinder (OC), the Retard voltage (V Ret), Lens 2 (L2), Lens 3 (L3) and the pass energy (V PE) with respect to ground.  Values are shown for both Mg and Al anode energies. (Note that the CTL and FWD lens voltages are also included in the table. The CTL and FCL lens voltages are measured at the end of the CTL and FCL cables, not in the filter box.)
  9. Select a few pass energies and measure and write down the voltages at all of the test points.   By comparing the results of your measurements to the values in the table you can determine of any of the supplies may have a problem. Typically the voltages measured should be within 10 volts of the values in the table.  If you have a problem with one or more of the supplies the measurement voltages will be off by a significant amount.
  10. If you do find that there are some incorrect voltages then your qualified technician  can use the calibration procedure in the 80-365 or 80-366 manual as a guide to help isolate the problem to the component level. If you do not have the necessary resources to troubleshoot the problem to the component level please contact RBD Instruments for repair options.

MULTIPLIER VOLTAGE TIP: Not listed in the table is the electron multiplier voltage. To test the multiplier voltage, remove the NEG and POS filter box covers and connect the high voltage probe clips between the resistors inside the multiplier NEG and POS filter boxes. Make the connections to the high voltage probe with the card rack power OFF.  When acquiring data the multiplier voltage should be within 10V of the value that the multiplier is set to in the software.

Mg
Pass Energy (eV) IS (E7) MR (E8) OS (E9) VRet (E3) L2 (E10) L3 (E11) V PE (E1)
2.95 -245.7 -246.7 -247.4 -249.7 -174.3 -209.7 -245.7
5.85 -241.8 -243.7 -245.1 -249.7 -214.0 -87.7 -241.7
11.75 -233.8 -237.6 -240.5 -249.7 -192.1 123.3 -233.6
23.5 -218.0 -225.6 -231.4 -249.7 -174.4 240.3 -217.6
29.35 -210.1 -219.6 -226.8 -249.7 -165.6 316.3 -209.6
46.95 -186.3 -201.5 -213.1 -249.7 -144.4 514.3 -185.5
58.7 -170.5 -189.5 -203.9 -249.7 -135.6 591.3 -169.4
93.9 -123.0 -153.4 -176.5 -249.7 -92.4 925.3 -121.3
117.4 -91.3 -129.3 -158.2 -249.7 -76.1 1082.3 -89.2
187.85 3.8 -57.0 -103.3 -249.7 -23.9 1625.3 7.2
Mode CTL FCL
Mg source 1253.6 Minimum -117.4 819.0
Work function 3.9 Small area -187.3 -192.3
All voltage respective to ground Large area -209.7 0.0
BE set to 1000 Small aper -123.6 819.0
Al
Pass Energy (eV) IS (E7) MR (E8) OS (E9) VRet (E3) L2 (E10) L3 (E11) V PE (E1)
2.95 -478.7 -479.7 -480.4 -482.7 -336.9 -442.7 -478.7
5.85 -474.8 -476.7 -478.1 -482.7 -429.5 -320.7 -474.7
11.75 -466.8 -470.6 -473.5 -482.7 -408.3 -109.7 -466.6
23.5 -451.0 -458.6 -464.4 -482.7 -392.0 7.3 -450.6
29.35 -443.1 -452.6 -459.8 -482.7 -383.2 83.3 -442.6
46.95 -419.3 -434.5 -446.1 -482.7 -362.0 281.3 -418.5
58.7 -403.5 -422.5 -436.9 -482.7 -353.2 358.3 -402.4
93.9 -356.0 -386.4 -409.5 -482.7 -311.6 692.3 -354.3
117.4 -324.3 -362.3 -391.2 -482.7 -291.4 849.3 -322.2
187.85 -229.2 -290.0 -336.3 -482.7 -229.6 1392.3 -225.8
Mode CTL FCL
Al source 1486.6 Minimum -226.9 1583.3
Work function 3.9 Small area -362.0 -371.7
All voltage respective to ground Large area -405.5 0.0
BE set to 1000 Small aper -238.9 1583.3
5600 SCA filter box E7 IC

5600 SCA filter box E7 IC

5600 SCA filter box E8 MR

5600 SCA filter box E8 MR

5600 SCA filter box E9 OS

5600 SCA filter box E9 OS

 

5600 SCA filter box E3 VRet

5600 SCA filter box E3 VRet

5600 SCA filter box E10 L2

5600 SCA filter box E10 L2

5600 SCA filter box E11 L3

5600 SCA filter box E11 L3

 

5600 SCA filter box E1 V PE

5600 SCA filter box E1 V PE

 

 

 

 

 

 

 

 

 

 

LS intro and LS stage notes

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This post is a compilation of notes that I have on the LS (large sample) intro and specimen stage used on older PHI 5400 and 5600 LS systems.

To Replace the LS Intro Ribbon:
First remove the 4 screws that hold the ribbon tape to the stage dock slider. These would be the back 4 screws (towards the feed-thru).
Remove the LS feed-thru knob.
Remove the LS ribbon feed assembly (about 8 7/16” bolts) and pull it straight back.
Loosen the 3 screws that provide tension to the wheel by backing them out all the way.
Remove the 4 screws that hold the screw assembly in place and remove the screw assembly.
The old ribbon can be removed (2 screws compress the slot).
Spin the wheel in the direction that the tape would go into the system until the wheel stops. This is the Fully In position.
Put the new tape into the LS intro slot and attach it to the stage dock slider. Make sure that the slider can move in and out smoothly. Adjust the slider if needed until the motion is as friction free as possible.
Remove the 4 screws and pull the tape out of the LS intro.
Install the new tape to the wheel in the Fully In position. Tighten the 2 screws to compress the wheel and hold the tape.
Re-install the screw assembly and tighten the 4 screws that hold it in place.
Tighten the 3 screws by turning them in finger tight until there is a reasonable amount of tension on the wheel. There needs to be enough tension to hold the tape and spin it onto the wheel, but not so much as to make the wheel hard to turn.
Wind the tape onto the wheel by spinning the wheel backwards. Guide the tape onto the wheel so that it goes on straight. Keep about 6 inches of the tape out.
Replace the LS ribbon feed assembly and gently guide the tape into the slot.
Attach the LS ribbon feed assembly with 2 bolts just to hold it in place for now.
Reconnect the 4 screws and attach the tape to the stage dock slider.
Insert a screw driver into the feed-thru port and verify that the tape and stage dock slider move smoothly. Adjust if needed.
Connect the rest of the 7/16” bolts to the LS ribbon feed assembly and tighten all of the bolts. The seal is made with a Viton O-ring.
Use a new 1.33″ copper gasket and attach the feed-thru knob.
Verify that the ribbon moves easily and smoothly. If not, remove and inspect.
Installation Complete!

Adjusting the stage to the DOCK, LOAD and Bake-out positions.

The Bake-out position is set to values where the stage has minimum load on all of the axis and cannot be changed. It is very important to set the stage to the bake-out position before removing the motors. If you take the motors off when the stage is not set to the bake-out position, serious damage to the stage can occur.
The nominal values are listed below for DOCK, LOAD, Home and Bake-out. DOCK and
LOAD need to be set to line up with the LS intro ribbon. Home is set to a central location of the stage that it at the focal point of the analyzer.
It is very difficult to line up the stage to the DOCK and LOAD positions when the system is under vacuum due to the limited visibility of the LS chamber.
So, if you cannot get it to line up by making small adjustments to the Y, rotation and Z axis, then you will need to vent so that you can use a mirror and look down the intro into the system. When the system is up to air this is very easy to do.
Notes:
You can fine tune the Y axis by removing the motor and manually centering the Y axis of the stage to line up with the LS intro ribbon. Then, set the Y axis motor to zero (0) mm and put the motor back on the Y axis stage micrometer.

Notes on the LS Stage (30-520) Operation

Warnings!
*********

Great care must be taken during the operation of this stage.
Careless operation can easily result in damage to the stage and/or
vacuum system components. If you consider that the stage
mechanism is sensitive, common sense dictates that you must observe
every motion carefully, and THINK before clicking a stage control
button and entering position parameter values. Loading and
unloading the platen are especially critical.

Stage Motion
************

The stage may be moved by either adjusting a particular position
parameter individually, or selecting one of the preset positions.
The preset position selection will adjust all position parameters
accordingly.

Each of the stage motion parameters (X, Y, Z, Tilt, and Rotate)
may be adjusted individually in two ways.
(1) By selecting the “Adjust” button
next to the parameter, the stage will track the indicated
position as you scroll it with the up/down arrows. This generally
is the safest method for moving the stage when the platen is
close to objects (x-ray source, analyzer nose, etc.) in the
chamber. However, it takes much longer to move long distances.
(2) By typing in the desired parameter position(s), then clicking
on “Set” for one particular position parameter, or “Set All” for
all position parameters simultaneously. the stage will move
directly to that position.
This is the fastest method for moving to a custom position, but
is also the most dangerous if the typed value(s) was
inappropriate considering any obstacles in that motion path.

The stage may also be moved to one of four preset positions.
Three (Dock, Load, and Home)
may be reset by the operator and the fourth (Bake) is set to a
predefined position and cannot be reset. They are described
as follows:

Preset Positions
1. “Dock” – puts the stage in position for sliding the platen on
or off of the stage itself from the intro chamber.
2. “Load” – raises the stage slightly from the “Dock” position so
that the intro ribbon may be disengaged
3. “Home” – a user defined position, usually used to move back to
a particular area currently under analysis. This
position may be redefined whenever desired.
4. “Bakeout” – moves the stage to the position where all tension-
ing springs are “de-energized”. The stage must be
moved to this position before removing the motors,
such as just before a bakeout.

When moving the stage with obstacles nearby and you are unsure of
the clearances, watch and be ready to click on the “Stop” button
to halt the motion of the stage.

To reset the “Dock”, “Load” or “Home” positions, simply move to the
desired stage position that you wish to reset it to, then click on
the “Reset (position)” button. It would be a very good idea to
note the original settings of “Dock” and “Load” before resetting
them, so that you can return to them if problems arise later with
the new reset position.

Transferring the platen
***********************

1. To transfer the platen from the intro chamber to the stage:
a) Set the stage to the “Dock” position.
b) Extend the intro ribbon until the platen is docked on
the stage. The proper position can be felt by
the engaging of a detent on the stage. The
platen will extend out both ends of the stage
by equal distances.
c) Carefully, select the “Load” position. This will
increase the Z axis slightly so that the ribbon
can release.
d) Withdraw the intro ribbon.

2. To transfer the platen from the stage to the intro chamber:
a) Set the stage to the “Dock” position.
b) Extend the intro ribbon until it engages the platen.
c) Start to withdraw the ribbon. The platen should follow.
d) Continue until the platen is in the intro chamber.

Operating Cautions and Hints
****************************

1. Always watch the platen and stage carefully through the view
ports during transfers.
2. If the platen stops moving, or disengages the ribbon during
the withdrawal, before the completion of the transfer,
attempt to move the platen back to the original position.
Then make a slight adjustment to one of the position
parameters (with the Adjust feature) and try again.
3. Be very cautious when making adjustments to the position
parameters when the ribbon is extended to the platen
and/or the platen is half on/off the stage. Make only
slight adjustments!

Amplifier Discriminator Tests

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One of the troubleshooting techniques that can be used to test the counting circuitry of an auger or XPS system is called “tickling the brick”.   The term came about from when the early PHI systems used the Princeton Applied Research (PAR) 1120 amplifier discriminator for pulse count detection of electrons. The 1120 kind of looked like a brick, and so the term “tickling the brick” was born.

Basically, tickling the brick tests the brick (amplifier discriminator) and the counting circuitry.   This is one of the first troubleshooting steps that you would take if you are not getting any counts at all with your auger, XPS or SIMS system.

The 1120 amplifier discriminator is still in use on many PHI systems, as is its newer replacement, the 1182.  The 1120 and 1182 are used with single channel detectors.

In addition to the 1120 and 1182 amplifier discriminators, the “tickling the brick” concept can also be applied to PSD and MCD detectors on XPS systems.

The procedures for each amplifier discriminator type are described below.

Amplifier-Discriminator

1120/1182 Test Procedure

  1. Set up a alignment (can be any range) and select the 1120/1182 as the signal input. For most PHI systems using AugerScan software, that will be PC1 input in the hardware properties dialog box.
  2. Remove the bnc input that goes between the analyzer and the 1120/1182
  3. Turn off the analyzer control and electron multiplier supply as they are not needed.
  4. Start the alignment acquisition and then stick a piece of wire into the bnc input of the 1120/1182. This wire will act like an antenna and you should see between 20 million and 30 million CPS of noise.
  5. Remove the wire and the counts should go to zero.

If the counts behave as expected then both the 1120/1182 and the counting circuitry are working properly.

PSD Position Sensitive Detector Preamp Test Procedure

PSD

PSD

 

 

 

 

 

 

 

 

  1. Set up an alignment (can be any range) and select the PSD as the signal input. For most PHI systems using AugerScan software, that will be the PSD input in the hardware properties dialog box.
  2. Turn the card rack power OFF.
  3. Remove the bnc inputs to the PSD that goe between the analyzer and the PSD. These are the little white wires that go from Preamps A and B to the analyzer.
  4. Connect a test clip to the center pins of each of the little white wire bnc connectors.
  5. Start the alignment acquisition and then with your fingers touch the ends of both of the test clips that go to the center pins of each of the little white wire bnc connectors. The test clips will act like an antennae and you should see about 50K to 80K CPS of noise. Both clips need to be touched at the same time. NOTE: The clips go to the wires, not the BNC connectors on the analyzer.
  6. Remove the test clips and the counts should go to zero.

If the counts behave as expected then both the PSD preamp and the counting circuitry are working properly.

Make sure that the card rack power is OFF when you reconnect the PSD cables to the analyzer.

MCD Amplifier/Discriminator Test Procedure.

MCD

MCD

 

 

 

 

 

 

  1. Set up an alignment (can be any range) and select the MCD as the signal input. For most PHI systems using AugerScan software, that will be the MCD input in the XPS hardware properties dialog box.
  2. Turn the card rack power OFF.
  3. Unscrew the MCD amplifier discriminator from the analyzer flange and carefully remove it. NOTE: Use care when reinstalling it after the test procedure to make sure you do not bend any pins. Also make sure that the card rack power is OFF when you reinstall the amplifier discriminator on the analyzer flange
  4. Turn on the card rack power and start the alignment.
  5. There are 20 socket connectors visible on the end of the MCD amplifier discriminator. Each of those connectors (except for the middle 4) represents one of the 16 channels that are connected to the MCD detector inside the analyzer.
  6. Start the alignment acquisition and then stick a wire into each of the open pins on the end of the MCD preamp, one at a time. The test clips will act like an antennae and you should see about 20K to 80K CPS of noise when the clip is inserted.
  7. Remove the wire and the counts should go to zero.
  8. Repeat steps 6 and 7 for each of the other pins on the end of the MCD amplifier discriminator.

If the counts behave as expected then both the MCD amplifier/discriminator and the counting circuitry are working properly.