microCMA Compact Auger Analyzer


 

An affordable surface sensitive analytical tool that will fit on your existing vacuum chamber


Simple to operate, easy to maintain:


RBD’s microCMA provides a complete quantitative surface sensitive elemental Auger Electron Spectroscopy (AES) analyzer package that mounts on a 2.75”/ 70 mm CF flange.


The USB interface and Windows acquisition and data massage software make it as simple to acquire AES data as it is to operate an RGA. The microCMA is Plug and Play Auger Spectroscopy made simple.


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micro-cma

Applications

The microCMA is a non-scanning (imaging) cylindrical mirror analyzer designed for the many applications for AES that do not require scanning (imaging) capability. 
Those applications include analysis of:

  • Thin film composition
  • Passive oxide thicknesses in semiconductors and metals
  • Metal component thermal oxides
  • Integrated circuit contamination
  • Characterization of sputtered layers
  • Auger depth profiles of deposited layers
  • Quantization of light element surface films


Features

  • Compact: Fits on a 2.75" (70 mm) flange. It is now possible to build an AES system with just a T and a small ion pump!
  • Proven Design: The second order focusing of the Cylindrical Mirror Analyzer provides both good transmission and resolution.
  • Easy to Use: With a USB interface and open architecture, the control and data- massage software interface is as simple to use as an RGA – point and click.
  • Powerful: Auger Electron Spectroscopy (AES) is a powerful surface sensitive technique that provides you with quantitative information on the first few monolayers of your sample.
cylindrical mirror analyzer

Custom lengths available

cma-analyze-control

AES Theory

Auger Electron Spectroscopy is an analytical technique that uses a primary electron beam to probe the surface of a solid sample. Secondary electrons are emitted as a result of the Auger effect and the kinetic energy of those electrons is element specific.  By differentiating the peak energy from the background energy, quantitative analysis is possible.  AES is a surface sensitive technique due to the short mean free path of the electrons, just a few nanometers.  All light elements except H and He are detected.

 

The cylindrical mirror analyzer is a variation of the parallel-plate analyzer design and is today the most popular type for AES due to the design's high sensitivity and throughput.

micro-cma data
micro-cma data

Specifications


Parameter Specification
Analyzer Type Single Pass CMA (Cylindrical Mirror Analyzer) Auger spectrometer
Analyzer Working Distance 3.5 mm
Energy Resolution Fixed at 0.65 %
Signal-to-Noise 100:1 @ 3 kV at 300 nA beam current on clean silver
Electron Multiplier Extended Dynamic Range Channelltron
Electron Gun Coaxial 3 kV, non-imaging
Minimum Spot Size 150 uM, de-focused 500 uM
Filament Tungsten
Analyzer Mounting 70 mm (2.75”) OD.  Needs 1.52" ID tube
Vacuum Integrity UHV bakeable to 200 degrees C
Power Supply/Control USB protocol, software controlled includes integrated 3 kV electron gun control, multiplier supply, sweep voltage supply and V/F preamp.
Specify 220 VAC or 120 VAC single phase line voltage.

 

microCMA Datasheet

 

microCMA SOLIDWORKS® File

microCMA SOLIDWORKS

 

microCMA Dimensions Form