Refurbished & Used Physical Electronics / PHI Optics Components

RBD Instruments sells refurbished PHI optics components, as well as other used optics.
Our current inventory is listed below.

More information...
or call us at 541 550 5016


Sputter Ion Guns

RBD P/N Model Description
VLV-KIT Varian leak valve repair kit Varian leak vavle repair kit - 0061061800
10-410RF 10-410 monochromator PHI 10-410 monochromator - Does not include x-ray source (One Year Warranty)

Improve the energy resolution on your exisitng PHI 5000 series XPS system.

10-410 manual and specifications
04303PKGRF 04-303/11-065
PHI 5kV Ion Gun Package - includes ion gun, controller, and cables (One Year Warranty)

04-303 Datasheet


04192RF 04-192 ion source 5kV backfill ion source (One year warranty)
04161RF 04-161 ion source 2kV backfill ion source (One year warranty)



RBD P/N Model Description
15-255G double pass CMA used for ESCA (XPS) and AES - rebuilt to original specifications

(One Year Warranty)


X-ray Sources and X-ray Generator Packages

RBD P/N Model Description
04548PKGRF 04-548 15 kV dual anode XPS Subsystem. Includes 04-548 source, electronics, water chiller and cables.


04548RF 04-548 15kV Dual Anode X-ray Source ONLY



Other (Optics, Turbo Pumps, RGAs)

RBD P/N Model Description
FIG1130RF FIG-1130
(Three available)
04202RF 04-202 04-202 SED detector (One Year Warranty)
04202PKGRF 04-202 & 97 SED 04-202 SED detector and Model 97 SED preamplifier
(One Year Warranty)