Operating Procedure for Using the PHI EIA-485 Ion Gun Control Interface
If you have a The PHI EIA-485 Ion Gun Control Interface, you can still control
timed sputter and depth profile sputtering from AugerScan.
Install the PHI software and follow all procedures for setting up and running
your ion gun control. From the AugerScan System menu, select Hardware
Properties and choose the PHI EIA-485 ion gun control for you selected technique.
Important: For proper ion gun control using AugerScan during depth profiles and timed
sputter, first ensure that the PHI Ion Gun Control software is already running.
You must set the ion gun to Standby or Blanking mode before sputtering from
AugerScan. If this is the first time using AugerScan to control the PHI software, it
may be best select the Sputter command from the AugerScan System menu, and run
a timed manual sputter to ensure proper operation before running any depth
profiles.