Calculating the SIMS Atomic Density

You can calculate the Atomic Density of a SIMS depth profile with two regions, provided you have already calculated the Relative Sensitivity Factor for that impurity region with respect to a given matrix.

To create an RSF file for a matrix (with various impurities listed), use Notepad (or a similar text editor) to create a file with the following format, shown by this example:

SIMS RSF

Matrix Element: Si; Ion Beam Type: Cesium; Ion Beam Voltage: 6000;

Element Atomic# RSF

H 1 4.8e+023

Be 2 7.1e+021

B 3 2.6e+022

C 4 2.5e+024

You may have as many impurities (listed under element) as you wish. Name the file with a “.rsf” extension.

To calculate the Atomic Density, select SIMS Atomic Density from the Data menu. You will be prompted to select the RSF file you wish to use.

For more information on calculating the Relative Sensitivity Factor (RSF) from a SIMS depth profile, click here.