Calculating the SIMS Atomic Density
You can calculate the Atomic Density of a SIMS depth profile with two regions,
provided you have already calculated the Relative Sensitivity Factor for that
impurity region with respect to a given matrix.
To create an RSF file for a matrix (with various impurities listed), use
Notepad (or a similar text editor) to create a file with the following format, shown
by this example:
- *************************************************************************************
SIMS RSF
Matrix Element: Si; Ion Beam Type: Cesium; Ion Beam Voltage: 6000;
Element Atomic# RSF
H 1 4.8e+023
Be 2 7.1e+021
B 3 2.6e+022
C 4 2.5e+024
- **************************************************************************************
You may have as many impurities (listed under element) as you wish. Name the
file with a “.rsf” extension.
To calculate the Atomic Density, select SIMS Atomic Density from the Data
menu. You will be prompted to select the RSF file you wish to use.
For more information on calculating the Relative Sensitivity Factor (RSF) from
a SIMS depth profile, click here.