Introducing the
microCMA Compact Auger Analyzer:
Affordable Surface Science
With the advent of our microCMA the world of AES analysis is both smaller and larger. Weighing in at less than 2 pounds, the microCMA is small enough to mount on a 2.75" (70 mm) flange. But the small size of the microCMA also opens up a whole new world of possible applications, including in-situ analysis on MBE systems and in-line analysis of semiconductors.
Features
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Datasheet (pdf)
Preliminary Specifications
| Parameter | Specification |
|---|---|
| Analyzer Type | Single Pass CMA (Cylindrical Mirror Analyzer) |
| Analyzer Working Distance | 3 mm (0.12”) |
| Energy Resolution | Fixed at 0.65 % |
| Signal-to-Noise | 1500:1 @ 3 kV 5 μA on clean copper |
| Electron Multiplier | Extended Dynamic Range Channelltron |
| Electron Gun | Coaxial 3 kV, non-imaging |
| Minimum Spot Size | 25 μm, de-focused 1 mm |
| Filament | CeBixTM |
| Analyzer Mounting | 70 mm (2.75”) |
| Electron Gun | Coaxial 3 kV, non-imaging |
| Vacuum Integrity | UHV bakeable to 200 degrees C |
| Power Supply/Control | USB protocol, software controlled |
Applications
The microCMA is a non-scanning (imaging) cylindrical mirror analyzer which was designed for the 80% of applications for AES that do not require scanning capability. Some of those applications include:
Analysis of:
- Thin film composition
- Passive oxide thicknesses in semiconductors and metals
- Metal component thermal oxides
- Integrated circuit contamination
Additional applications:
- Characterization of sputtered layers
- Auger depth profiles of deposited layers
- Quantization of light element surface films
AES Theory
Auger Electron Spectroscopy is an analytical technique that uses a primary electron beam to probe the surface of a solid sample. Secondary electrons are emitted as a result of the Auger effect and the kinetic energy of those electrons is element specific. By differentiating the peak energy from the background energy, quantitative analysis is possible. AES is a surface sensitive technique due to the short mean free path of the electrons, just a few nanometers. All light elements except H and He are detected.
The cylindrical mirror analyzer is a variation of the parallel-plate analyzer design and is today the most popular type for AES due to the design’s high sensitivity and throughput
Additional Resources on AES Theory
Auger Electron Spectroscopy Wikipedia
Eagle Analytical Labs AES Theory
Washington State University AES
Johns Hopkins University Principles of AES
Relevant Industries which use AES
Aerospace Biomedical Coatings
Data Storage Defense Healthcare
Plasma displays Electronics Energy
Manufacturing Metals Mining
Semiconductors Solar PV films Telecommunications
Vacuum Depositions
For more information please contact us at 541 330 0723 X 304 or email us at technicalsales@rbdinstruments.com
